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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

《机械工程前沿（英文）》 2017年 第12卷 第2期   页码 193-202 doi: 10.1007/s11465-017-0448-8

摘要：

Large-aperture potassium dihydrogen phosphate (KDP) crystals are widely used in the laser path of inertial confinement fusion (ICF) systems. The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting. When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cutting machine and fluctuations in the fly cutting environment are translated into surface errors at different spatial frequency bands. These machining errors should be suppressed effectively to guarantee that KDP crystals meet the full-band machining accuracy specified in the evaluation index. In this study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision fly cutting of the material are investigated. The structures of the fly cutting machine and existing processing parameters are optimized to improve the machined surface quality. The findings are theoretically and practically important in the development of high-energy laser systems in China.

关键词： ultra-precision fly cutting     large-aperture KDP crystals     spatial frequency     processing error    

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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

《机械工程前沿（英文）》 2017年 第12卷 第2期   页码 158-180 doi: 10.1007/s11465-017-0455-9

摘要：

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

关键词： ultra-precision grinding     ultra-precision cutting     ultra-precision polishing     research status in China     development tendency    

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

《机械工程前沿（英文）》 2017年 第12卷 第1期   页码 77-88 doi: 10.1007/s11465-017-0411-8

摘要：

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

关键词： brittle     soft     functional crystal     ultra-precision machining    

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

《机械工程前沿（英文）》 2017年 第12卷 第1期   页码 1-2 doi: 10.1007/s11465-017-0445-y

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

《机械工程前沿（英文）》 2009年 第4卷 第1期   页码 64-70 doi: 10.1007/s11465-009-0009-x

摘要： Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

关键词： dynamics analysis     air-bearing     linear stage     reduction    

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

《机械工程前沿（英文）》 2017年 第12卷 第1期   页码 89-98 doi: 10.1007/s11465-017-0412-7

摘要：

Hard and brittle materials, such as silicon, SiC, and optical glasses, are widely used in aerospace, military, integrated circuit, and other fields because of their excellent physical and chemical properties. However, these materials display poor machinability because of their hard and brittle properties. Damages such as surface micro-crack and subsurface damage often occur during machining of hard and brittle materials. Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscale machining quality. However, the theoretical mechanism underlying this method remains unclear. This paper provides a review of present research on the molecular dynamics simulation of ultra-precision machining of hard and brittle materials. The future trends in this field are also discussed.

关键词： MD simulation     ultra-precision machining     hard and brittle materials     machining mechanism     review    

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

《机械工程前沿（英文）》 2008年 第3卷 第4期   页码 400-407 doi: 10.1007/s11465-008-0060-z

摘要： Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress vibration and mechanical contact. Spring-damping elements are used to emulate the complex interaction of the finite element model (FEM) developed in this paper and the system dynamic behaviors are analyzed. Through the experimental modal test, the validity and reliability of the model are proven. However, the dynamic characteristics including mode frequency, mode shape, and response amplitude are obviously changed with the position of air-bearings. The combined optimization method is used to optimize the air-bearings position. The best and worst positions are obtained using the dynamic characteristic analysis. The method can be generalized to the connection position of different components in manufacture elements and to implement the system dynamic characteristics optimization when the connection position can be changed.

关键词： manufacture     different     interaction     air-bearings     response amplitude    

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

《机械工程前沿（英文）》 2008年 第3卷 第2期   页码 158-163 doi: 10.1007/s11465-008-0031-4

摘要： This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air bearing stage. Smart materials such as electrorheological fluids have attracted many researchers’ attention because of their resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological damper’s characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller. The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing stage can be effectively improved through the introduction of the electrorheological damper.

关键词： post-yield     linear-motor     advanced sliding     pre-yield     position    

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高端光学元件超精密加工技术与装备发展研究

蒋庄德, 李常胜, 孙林, 段端志, 康城玮, 陈杉杉, 林启敬, 杨树明

《中国工程科学》 2023年 第25卷 第1期   页码 131-141 doi: 10.15302/J-SSCAE-2023.07.003

摘要：

高端光学元件是决定高端装备性能水平的核心零件，研究高端光学元件超精密加工技术与装备发展，对于实施制造强国战略、满足高端装备产业需求具有积极意义。本文剖析了光学元件超精密加工方法与装备、高性能基础部件、超精密光学加工中的测量方法与装备等的发展情况，凝练了精度与尺寸极端化、形状与性能一体化、加工工艺复合化、加工与检测一体化、装备与工艺智能化等发展趋势。通过广泛的行业调研和研讨，从需求、目标、产品、关键技术、应用示范、支撑保障等层次着手，形成了面向2035 年我国高端光学元件超精密制造技术路线图。针对性提出了优化创新体系设置、组织优势资源成立技术联盟，加大资源保障力度、布局基础研究和技术攻关计划，加强人才培育、构建梯队并扩大队伍规模，筑牢产业发展基础、培育龙头企业和专精特新“小巨人”企业等发展建议，以期促进高端光学元件加工产业提升与高质量发展。

关键词： 光学元件；精密制造；超精密机床；超精密加工；光学加工    

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

《机械工程前沿（英文）》 2008年 第3卷 第2期   页码 119-132 doi: 10.1007/s11465-008-0034-1

摘要： With the rapid development of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precision machining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precision driving theory and technology. Modern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagnetic driving technology. Electromagnetic driving technology is based on traditional technology, has a low thrust-weight ratio, and needs deceleration devices with a cumbrous system or a complex structure. Moreover, it is difficult to improve positioning accuracy with this technology type. Thus, electromagnetic driving technology is still unable to meet the requirements for the above applications. Non-electromagnetic driving technology is a new choice. As a category of non-electromagnetic driving technology, piezoelectric driving technology becomes an important branch of modern precision driving technology. High holding torque and acute response make it suitable as an accurate positioning actuator. This paper presents the development of piezoelectric precision driving technology at home and abroad and gives an in-depth analysis. Future perspectives on the technology’s applications in the following fields are described: 1) integrated circuit manufacturing technology; 2) fiber optic component manufacturing technology; 3) micro parts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision processing technology.

关键词： Electromagnetic     ultra-precision processing     technology     piezoelectric     cumbrous    

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

《机械工程前沿（英文）》 2007年 第2卷 第3期   页码 350-355 doi: 10.1007/s11465-007-0061-3

摘要： In this paper, a novel conditioning technique using copper bonded diamond grinding wheels of 91 yD grain size and electrolytic in-process dressing (ELID) is first developed to precisely and effectively condition a nickel-electroplated monolayer coarse-grained diamond grinding wheel of 151 μm grain size. Under optimised conditioning parameters, the super abrasive diamond wheel was well conditioned in terms of a minimized run-out error and flattened diamond grain surfaces of constant peripheral envelope. The conditioning force was monitored by a force transducer, while the modified wheel surface status was in-situ monitored by a coaxial optical distance measurement system. Finally, the grinding experiment on BK7 was conducted using the well-conditioned wheel with the corresponding surface morphology and subsurface damage measured by atomic force microscope (AFM) and scanning electric microscope (SEM), respectively. The experimental result shows that the newly developed conditioning technique is applicable and feasible to ductile grinding optical glass featuring nano scale surface roughness, indicating the potential of super abrasive diamond wheels in ductile machining brittle materials.

关键词： ELID     peripheral     electrolytic in-process     nickel-electroplated monolayer     measurement    

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A novel approach to preparing ultra-lightweight ceramsite with a large amount of fly ash

Sen Liu, Congren Yang, Wei Liu, Longsheng Yi, Wenqing Qin

《环境科学与工程前沿（英文）》 2020年 第14卷 第4期 doi: 10.1007/s11783-020-1241-1

摘要： •Ultra-lightweight ceramsite is prepared with 80% fly ash. •SiO2, Al2O3, and flux contents significantly influence the performance of ceramsite. •The expansion of ceramsite is caused by the formation of a dense glaze and gas. •The bulk density of ultra-lightweight ceramsite is only 340 kg/m3. The disposal of fly ash has become a serious problem in China due to its rapid increase in volume in recent years. The most common method of fly ash disposal is solidification-stabilization-landfill, and the most common reuse is low-value-added building materials. A novel processing method for preparing ultra-lightweight ceramsite with fly ash was developed. The results show that the optimal parameters for preparation of ultra-lightweight ceramsite are as follows: mass ratio of fly ash:kaolin:diatomite= 80:15:5, preheating temperature of 800°C, preheating time of 5 min, sintering temperature of 1220°C, and sintering time of 10 min. The expansion agent is perlite, at 10 wt.% addition. Finally, a ceramsite with bulk density of 340 kg/m3, particle density of 0.68 g/cm3, and cylinder compressive strength of 1.02 MPa was obtained. Because of its low density and high porosity, ultra-lightweight ceramsite has excellent thermal insulation performance, and its strength is generally low, so it is usually used in the production of thermal insulation concrete and its products. The formation of a liquid-phase component on the surface, and generation of a gas phase inside ceramsite during the sintering process, make it possible to control the production of the suitable liquid phase and gas in this system, resulting in an optimization of the expansion behavior and microstructure of ceramsite. These characteristics show the feasibility of industrial applications of fly ash for the production of ultra-lightweight ceramsite, which could not only produce economic benefits, but also conserve land resources and protect the environment.

关键词： Fly ash     Ultra-lightweight ceramsite     Expansion mechanism     Sintering process    

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Coupling evaluation for material removal and thermal control on precision milling machine tools

《机械工程前沿（英文）》 2022年 第17卷 第1期   页码 12-12 doi: 10.1007/s11465-021-0668-9

摘要： Machine tools are one of the most representative machining systems in manufacturing. The energy consumption of machine tools has been a research hotspot and frontier for green low-carbon manufacturing. However, previous research merely regarded the material removal (MR) energy as useful energy consumption and ignored the useful energy consumed by thermal control (TC) for maintaining internal thermal stability and machining accuracy. In pursuit of energy-efficient, high-precision machining, more attention should be paid to the energy consumption of TC and the coupling relationship between MR and TC. Hence, the cutting energy efficiency model considering the coupling relationship is established based on the law of conservation of energy. An index of energy consumption ratio of TC is proposed to characterize its effect on total energy usage. Furthermore, the heat characteristics are analyzed, which can be adopted to represent machining accuracy. Experimental study indicates that TC is the main energy-consuming process of the precision milling machine tool, which overwhelms the energy consumption of MR. The forced cooling mode of TC results in a 7% reduction in cutting energy efficiency. Regression analysis shows that heat dissipation positively contributes 54.1% to machining accuracy, whereas heat generation negatively contributes 45.9%. This paper reveals the coupling effect of MR and TC on energy efficiency and machining accuracy. It can provide a foundation for energy-efficient, high-precision machining of machine tools.

关键词： machine tools     cutting energy efficiency     thermal stability     machining accuracy     coupling evaluation    

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A hybrid deep learning model for robust prediction of the dimensional accuracy in precision milling of

《机械工程前沿（英文）》 2022年 第17卷 第3期 doi: 10.1007/s11465-022-0688-0

摘要： The use of artificial intelligence to process sensor data and predict the dimensional accuracy of machined parts is of great interest to the manufacturing community and can facilitate the intelligent production of many key engineering components. In this study, we develop a predictive model of the dimensional accuracy for precision milling of thin-walled structural components. The aim is to classify three typical features of a structural component—squares, slots, and holes—into various categories based on their dimensional errors (i.e., “high precision,” “pass,” and “unqualified”). Two different types of classification schemes have been considered in this study: those that perform feature extraction by using the convolutional neural networks and those based on an explicit feature extraction procedure. The classification accuracy of the popular machine learning methods has been evaluated in comparison with the proposed deep learning model. Based on the experimental data collected during the milling experiments, the proposed model proved to be capable of predicting dimensional accuracy using cutting parameters (i.e., “static features”) and cutting-force data (i.e., “dynamic features”). The average classification accuracy obtained using the proposed deep learning model was 9.55% higher than the best machine learning algorithm considered in this paper. Moreover, the robustness of the hybrid model has been studied by considering the white Gaussian and coherent noises. Hence, the proposed hybrid model provides an efficient way of fusing different sources of process data and can be adopted for prediction of the machining quality in noisy environments.

关键词： precision milling     dimensional accuracy     cutting force     convolutional neural networks     coherent noise    

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标题 作者 时间 类型 操作

Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

期刊论文

Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

期刊论文

Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

期刊论文

Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

期刊论文

Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

期刊论文

Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

期刊论文

Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

期刊论文

Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

期刊论文

Jianguo He：Ultra-precision Cutting Technology and Equipment toward Extreme Manufacturing（2019年10月10日）

2021年04月23日

会议视频

高端光学元件超精密加工技术与装备发展研究

蒋庄德, 李常胜, 孙林, 段端志, 康城玮, 陈杉杉, 林启敬, 杨树明

期刊论文

Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

期刊论文

Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

期刊论文

A novel approach to preparing ultra-lightweight ceramsite with a large amount of fly ash

Sen Liu, Congren Yang, Wei Liu, Longsheng Yi, Wenqing Qin

期刊论文

Coupling evaluation for material removal and thermal control on precision milling machine tools

期刊论文

A hybrid deep learning model for robust prediction of the dimensional accuracy in precision milling of

期刊论文